JPH0730677Y2 - シャッター装置 - Google Patents

シャッター装置

Info

Publication number
JPH0730677Y2
JPH0730677Y2 JP1989128928U JP12892889U JPH0730677Y2 JP H0730677 Y2 JPH0730677 Y2 JP H0730677Y2 JP 1989128928 U JP1989128928 U JP 1989128928U JP 12892889 U JP12892889 U JP 12892889U JP H0730677 Y2 JPH0730677 Y2 JP H0730677Y2
Authority
JP
Japan
Prior art keywords
shutter plate
cylinder
shutter
plate
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989128928U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0367059U (en]
Inventor
仁章 平間
俊一 村上
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP1989128928U priority Critical patent/JPH0730677Y2/ja
Publication of JPH0367059U publication Critical patent/JPH0367059U/ja
Application granted granted Critical
Publication of JPH0730677Y2 publication Critical patent/JPH0730677Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1989128928U 1989-11-02 1989-11-02 シャッター装置 Expired - Lifetime JPH0730677Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989128928U JPH0730677Y2 (ja) 1989-11-02 1989-11-02 シャッター装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989128928U JPH0730677Y2 (ja) 1989-11-02 1989-11-02 シャッター装置

Publications (2)

Publication Number Publication Date
JPH0367059U JPH0367059U (en]) 1991-06-28
JPH0730677Y2 true JPH0730677Y2 (ja) 1995-07-12

Family

ID=31676599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989128928U Expired - Lifetime JPH0730677Y2 (ja) 1989-11-02 1989-11-02 シャッター装置

Country Status (1)

Country Link
JP (1) JPH0730677Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01222049A (ja) * 1988-03-01 1989-09-05 Fujitsu Ltd のぞき窓用シャッター機構

Also Published As

Publication number Publication date
JPH0367059U (en]) 1991-06-28

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